Mark Kushner

Violi George I. Haddad Professor of Electrical Engineering and Computer Science; Director, Michigan Institute for Plasma Science and Engineering; Professor, EECS, NERS, Chemical Eng, and Applied Physics

2236 EECS
(734) 647-8148
mjkush@umich.edu

Plasma science and technology: materials processing, propulsion, lasers, electromagnetics, plasma chemistry, microelectronics/MEMS fabrication, polymer funtionalization, biocompatibility

Kushner Research Group Page

Short Bio
Research
Publications

Biographical Information

Education

Ph.D.	California Institute of Technology	Applied Physics	1979
M.S.	California Institute of Technology	Applied Physics	1977
B.S.	University of California at Los Angeles	Nuclear Engineering	1976
B.A.	University of California at Los Angeles	Astronomy	1976

Professional Experience

University of Michigan
Ann Arbor, Michigan

2008-present

George I Haddad Collegiate Professor, Electrical Engineering & Computer Science Dept.
Professor, Nuclear Engineering and Radiological Sciences Dept.
Professor, Applied Physics Program
Professor, Chemical Engineering
Director, Michigan Institute for Plasma Science and Engineering
Director, DOE Center on Control of Plasma Kinetics

Iowa State University
Ames, Iowa
2005-2008 Dean, College of Engineering
Melsa Professor of Engineering, Department of Electrical and Computer Engineering

University of Illinois at Urbana-Champaign
2005-present Adjunct Faculty, Department of Electrical and Computer Engineering
1999-2004 Founder Professor of Engineering
1991-2004 Professor, Department of Electrical and Computer Engineering
2002-2004 Interim Head of Chemical and Biomolecular Engineering
2001 Interim Head of Electrical and Computer Engineering
2000 Interim Associate Dean of Administrative Affairs, College of Engineering
1994-1995 Assistant Dean of Academic Programs, College of Engineering
1988-1991 Associate Professor, Electrical and Computer Engineering
1986-1988 Assistant Professor, Electrical and Computer Engineering

Awards and Honors

National Academy of Engineering, 2011
Will Allis Prize for the Study of Ionized Gases, American Physical Society, 2010
Medard Welch Award, American Vacuum Society, 2010
Alumni Academic Achievement Award, UCLA College of Engineering, 2009.
Semiconductor Industry Association University Researcher Award, 2008
SRC Student Symposium, Best-in-Session Award; 2005, 2006
AVS Distinguished Lecturer 2001-2003
IEEE Plasma Science and Applications Award, 2000

Research Interests

Plasma science and technology: materials processing, propulsion, lasers, electromagnetics, plasma chemistry, microelectronics/MEMS fabrication, polymer funtionalization, biocompatibility

Research Areas

Applied Electromagnetics; MEMS and Microsystems; Optics and Photonics; Quantum Science and Devices; Integrated Circuits and VLSI; Plasma Science and Engineering; Energy Science and Engineering.

Areas of Speciality

Computational Electromagnetics; Microfluidics and Gas/Chemical; MEMS Technology and Packaging; Optoelectronics; Plasma Fabrication and Plasma Based MEMS Devices; Plasma Materials Processing of Microelectronics; Plasma Science and Engineering; Solid-State Energy Conversion Technologies; Plasma Science & Engineering.

Recent Publications

(A complete list of publications is available on the group web page)

270 Refereed Journal Articles, 124 Invited Conference Presentations, 440 Contributed Conference
Presentations, 132 Invited Symposia, Seminar and Short Course Presentations, 13 NRC Reports, Trade
and Popular Publications, 3 patents/registrations.