Education:

California Institute of Technology
PhD Applied Physics ’79
MS Applied Physics, ’77

University of California at Los Angeles
BS Nuclear Engineering (Summa Cum Laude) ’76
BA Astronomy (Summa Cum Laude) ’76

Research Interests: ^top

Research Interests

Low Temperature Plasmas, Laser Physics and Spectroscopy, Plasma Chemistry, Plasma and Photochemical Materials Processing, Amorphous Thin Films, Pulse Power Plasmas, Environmental and Medical Applications of Plasmas

Research Areas

Applied electromagnetics, MEMS and microsystems, optics and photonics, quantum science and engineering, integrated circuit design and VLSI, plasma science and engineering, energy and power.

Areas of Specialty

Computational electromagnetics, microfluidics and gas/chemical, MEMS technology and packaging, optoelectronics, plasma fabrication and plasma-based MEMS devices, plasma materials processing of microelectronics, plasma science and engineering; solid-state energy conversion technologies.

Biography: ^top

Professional Service

University of Michigan
Ann Arbor, Michigan
2008-present

George I Haddad Collegiate Professor, Electrical Engineering & Computer Science Dept.
Professor, Nuclear Engineering and Radiological Sciences Dept.
Professor, Applied Physics Program
Professor, Chemical Engineering
Director, Michigan Institute for Plasma Science and Engineering
Director, DOE Center on Control of Plasma Kinetics

Iowa State University
Ames, Iowa
2005-2008

Dean, College of Engineering
Melsa Professor of Engineering, Department of Electrical and Computer Engineering

University of Illinois at Urbana-Champaign

2005-present Adjunct Faculty, Department of Electrical and Computer Engineering
1999-2004 Founder Professor of Engineering
1991-2004 Professor, Department of Electrical and Computer Engineering
2002-2004 Interim Head of Chemical and Biomolecular Engineering
2001 Interim Head of Electrical and Computer Engineering
2000 Interim Associate Dean of Administrative Affairs, College of Engineering
1994-1995 Assistant Dean of Academic Programs, College of Engineering
1988-1991 Associate Professor, Electrical and Computer Engineering
1986-1988 Assistant Professor, Electrical and Computer Engineering

Awards: ^top

Charles K. Birdsall Award, Inst. Electrical and Electronic Engineers (IEEE), 2015
National Academy of Engineering, 2011
Will Allis Prize for the Study of Ionized Gases, 2010
American Physical Society
Medard Welch Award, 2010
American Vacuum Society
Alumni Academic Achievement Award, 2009
UCLA College of Engineering
University Researcher Award, 2008
Semiconductor Industry Association
SRC Student Symposium, Best-in-Session Award; 2005, 2006
AVS Distinguished Lecturer 2001-2003
IEEE Plasma Science and Applications Award, 2000
Institute of Electrical and Electronics Engineers